Etec
Systems, Inc.
Semi-Conductor Tool Manufacturer
Hillsboro, Oregon
Date: 1999
Cost: $50,000,000
Area: 177,000 GSF
This project entailed the expansion of an existing facility and the
design and construction of a new 177,000 GSF manufacturing clean room
facility including 48,000 sq. ft. of office space, 17,500 sq. ft. of
Class 10 (ISO 4) and Class 100 (ISO 5) clean room test cells and process
labs, 25,000 sq. ft. of Class 10,000 (ISO 7) clean room support and
circulation areas, and a 2,000 ton chiller plant.
The project featured a 200 BHP hot water heating plant, a new kitchen/dining
facility, an exercise facility with locker rooms and showers, tool/equipment
hookup, corrosive waste and neutralization system, ultra high pure
water, Clean Dry Air (CDA), vacuum, electronic grade nitrogen, chlorine,
process cooling water and argon. Systems included large, oil-less screw
compressors, desiccant filters, ultra-final filtration and orbital
stainless steel piping.
